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工艺技术

序号2026年上半年度致谢SMDL的论文名称发表期刊课题组发表日期
1
High-sensitivity modulation-doped charge sensitive infrared phototransistorsJOURNAL OF PHYSICS:CONDENSED MATTER陆卫课题组，上海科技大学2026年3月
2A Scalable Platform for High Cooperativity and Multimode Ultrastrong Plasmon–Phonon CouplingACS PHOTONICS陆卫课题组，上海科技大学2026年3月
312-in Bottom-Pinned VCMA-MRAM Devices With 0.6 ns Switching Speed, 30 fJ/bit Write Energy, and 10¹⁴ EnduranceIEEE ELECTRON DEVICE LETTERS寇煦丰课题组，上海科技大学2026年4月
4Thin film lithium niobate on sapphire for integrated mid-infrared modulatorNATURE COMMUNICATIONS陈佰乐课题组，上海科技大学2026年2月
5Nonlinear Uni-Traveling Hole photodiode for diffractive optical neural networkSEMICONDUCTOR SCIENCE AND TECHNOLOGY陈佰乐课题组，上海科技大学2026年3月
6Integrated photonics enabling ultra-wideband fibre–wireless communicationNATURE陈佰乐课题组，上海科技大学2026年2月
7Directly-Modulated MWIR FSO Communication with High-Speed Uni-Traveling Carrier PhotodiodeJOURNAL OF LIGHTWAVE TECHNOLOGY陈佰乐课题组，上海科技大学2026年3月
8J-Band Waveguide-Coupled UTC-PD Module Enabling 200 Gbit/s Photonic Terahertz CommunicationsOPTICAL FIBER COMMUNICATION CONFERENCE陈佰乐课题组，上海科技大学2026年3月
9Minimalist terahertz wireless transceiver in integrated photonicsNATURE COMMUNICATIONS陈佰乐课题组，上海科技大学2026年3月
10MXene Nanoparticle Lattices Support Chemically Tunable NanolasingLASER & PHOTONICS REVIEWS邓诗凯课题组，沪科研单位2026年4月
11Electrically Modulated Gap Interference for Tunable Plasmonic MetasurfacesNANO LETTERS邓诗凯课题组，沪科研单位2026年4月
12Topological photonic crystal triangular micro-cavity for on-chip gas sensingSENSORS AND ACTUATORS: B. CHEMICAL邹毅课题组，上海科技大学2026年3月
13A Hyperuniform Disordered Solid Waveguide for Gas SensingADVANCED OPTICAL MATERIALS邹毅课题组，上海科技大学2026年4月
14Large-mode area erbium-doped tantalum pentoxide waveguide amplifier with high on-chip net gainOPTICS LETTERS邹毅课题组，上海科技大学2026年1月
15Efficient Slow-Light-Enhanced Acouto-Optic Modulation on AlScN-SiO2-SOI Hybrid Integrated PlatformCLEO: APPLICATIONS AND TECHNOLOGY CONFERENCE PROCEEDINGS邹毅课题组，上海科技大学2026年5月
16Dispersionless Coupling Control Enabled by Artificial Gauge Fields for Dense Waveguide Arrays and Arbitrary-Ratio Power SplittersOPTO-ELECTRONIC ADVANCES邹毅课题组，上海科技大学2026年6月
17An efficient mid-infrared computational spectrometer based on synergistic microcavity-coupled photonic crystal waveguidesNATURE COMMUNICATIONS邹毅课题组，上海科技大学2026年6月
18GaN-based high output voltage binary and ternary digital components achieved by neutral beam etchingMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING邹新波课题组，上海科技大学2026年2月
19Electrically controlled strain tuning of spin defects in a hybrid 4H-silicon carbide-on-lithium niobate integrated platformPHOTONICS RESEARCH欧欣课题组，沪科研单位2026年5月
20Vacuum-interconnected sequential deposition enabling highly stable MoOₓ-based crystalline silicon solar cellsCHEMICAL ENGINEERING JOURNAL李东栋课题组，沪科研单位2026年3月
21Low Insertion Loss and Near-Zero TCF Gigahertz Acoustic Delay Lines Based on LN and AlN Double LayersIEEE MICROWAVE AND WIRELESS TECHNOLOGY LETTERS吴涛课题组，上海科技大学2026年3月
222.9 GHz Electro-Acoustic Phase Modulator Based on AlScN Thin Film2026 IEEE 39TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（会议论文）吴涛课题组，上海科技大学2026年3月
233.7 GHz Acoustic Wave Amplitude Modulation via On-Chip Thermo-Acoustic Phase Control2026 IEEE 39TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（会议论文）吴涛课题组，上海科技大学2026年3月
24Electrically Tunable Suspended Acoustic Mach–Zehnder Interferometer Based on AlScN Thin Films2026 IEEE 39TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（会议论文）吴涛课题组，上海科技大学2026年3月
25Ultra-compact Analog Thermo-acoustic PhaseShifterCHIP吴涛课题组，上海科技大学2026年1月
26Dual-Frequency PZT PMUTs via Enhanced 2nd-Order Nonlinearity for Advanced Ultrasound Imaging2026 IEEE 39TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（会议论文）吴涛课题组，上海科技大学2026年1月
27Magnetically Tunable Mems Acoustic Isolator Over 60 DB Isolation Via Piezoelectric-Lorentz Coupling2026 IEEE 39TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（会议论文）吴涛课题组，上海科技大学2026年1月
28Magnetic-Field Tuning of Acoustic Propagation in Multiferroic Thin-Film HeterostructuresIEEE TRANSACTIONS ON MAGNETICS吴涛课题组，上海科技大学2026年1月
29Characteristic of LiNbO3 thin film ICP etching for micro/nano fabricationJournal of Micromechanics and Microengineering吴涛课题组，上海科技大学2026年3月
30Stability of laser-induced 1T′-MoTe2AIP ADVANCES李天信课题组，沪科研单位2026年4月
31On-chip amplification-free fCEO detection and broadband SCG in parabolically width-modulated TFLN waveguidesJOURNAL OF MICROMECHANICS AND MICROENGINEERING陆娟娟课题组，上海科技大学2026年3月
32Molecular Weight and Polydispersity Effects on Electron Beam Lithography Performance of RAFT-Mediated PMMAACS APPLIED POLYMER MATERIALS朱慧娥课题组，沪科研单位2026年3月
33Electrically resolving 1 nanometer semiconductor quantum wells and superlattices in photodiodes by conductive scanning probe microscopyNANOSCALE李天信课题组，沪科研单位2026年4月
34Non-Invasive Evaluation of Radial Artery Stiffness Via Piezoelectric Micromechanical Ultrasonic Transducer and Pressure Sensor Fusion2026 IEEE 39TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（会议论文）吴涛课题组，上海科技大学2026年3月
35Self-Powered and High-Sensitivity 2D Perovskite/InSe Heterostructure Waveguide Photodetector for On-Chip Visible-Light BiosensingACS PHOTONICS储蔚课题组，沪科研单位2026年4月
36High-Sensitivity Graphene/2D Perovskite Hybrid Photodetector for Visible-Light Sensing on Silicon Nitride Photonic Integrated PlatformACS NANO储蔚课题组，沪科研单位2026年3月
37Precision etching process optimization and mechanism investigation for ultrathin Al2O3 thin films at the bottom of trenchesAPPLIED SURFACE SCIENCE步扬课题组，沪科研单位2026年4月
38Scalable Integration of Cavity-Enhanced Silicon Vacancy Centers on a CMOS-Compatible 4H-SiCOI PlatformNANO LETTERS张加祥课题组，沪科研单位2026年4月
39Scalable all-solid-state cavity QED on a hybrid quantum dot–lithium niobate platformNPJ QUANTUM INFORMATION张加祥课题组，沪科研单位2026年6月


*说明：论文出版时间（VoR时间或出版社官网发布时间）为2026.01.01-2026.06.30；本统计仅统计正式发表论文，不包含 arXiv 预印本。