立志微纳，成才卓越

工艺技术

序号2023年度致谢SQDL的科研论文发表期刊课题组
1Yonghao Bu#,   Xiansong Ren#, Jing Zhou#,*, Zhenhan Zhang#, Jie Deng, Hangyu Xu, Runzhang   Xie, Tianxin Li, Weida Hu*, Xia Guo, Wei Lu, Xiaoshuang Chen*, “Configurable   circular-polarization-dependent optoelectronic silent state for ultrahigh   light ellipticity discrimination”, Light Sci Appl. 12, 176 (2023)Light-Science & Applications中科院上海技物所，周靖课题组
2B.   Liu, S. Liu, V. Devaraj, Y. Yin, Y. Zhang, J. Ai, Y. Han, J. Feng, Nat.   Commun. 2023, 14, 4920.Nature Communications上海科技大学，冯继成课题组
3Spontaneous rotational symmetry breaking in KTaO3 interface   superconductor，Guanqun   Zhang, Lijie Wang, Jinghui Wang, Guangyi Huang, Guang Yang, Huanyi Xue,   Yueshen Wu, Jin-Peng Xu, Yanru Song*, Zhenghua An, Changlin Zheng, Jie Shen*,   Jun Li*, Yan Chen, Wei Li*，nature communications，14,3046(2023).Nature Communications复旦大学安正华课题组
4Wan,   D., Li, T., Chen, S., Chen, W., Hu, H., Set, S. Y., Yamashita, S., Shen, L.,   Zou, Y., Liu, T., Cheng, Z., Hyperuniform Disordered Solids with Morphology   Engineering. Laser Photonics Rev 2023, 17, 2300398.   https://doi.org/10.1002/lpor.202300398Laser&Photonics Reviews上海科技大学，邹毅课题组
5Artificial   Gauge Field Enabled Low‐Crosstalk,   Broadband, Half‐Wavelength   Pitched Waveguide ArraysLaser&Photonics Reviews上海科技大学，邹毅课题组
6Chuangwei   Sheng, Yonghao Bu, Yanyan Li, Liqin Su, Yue Yu, Dan Cao, Jing Zhou*,   Xiaoshuang Chen, Wei Lu, and Haibo Shu*, Phase-Controllable Growth of   Air-Stable SnS Nanostructures for High-Performance Photodetectors with   Ultralow Dark Current, ACS Applied Materials & Interfaces2023.ACS Applied Materials & Interfaces 中科院上海技物所，周靖课题组
7Cai   J, Wang Y, Jiang D, et al. Beyond fundamental resonance mode: High-order   multi-band ALN PMUT for in vivo photoacoustic imaging[J]. Microsystems &   Nanoengineering, 2022, 8(1): 116.Microsystems & Nanoengineering上海科技大学，吴涛课题组
8Wanxin   Li, Jiewen Li, Lin Yu, Yang Feng, Yong Yao, Yunxu Sun, Yi Zou, Xiaochuan Xu;   Observation of Aulter–Townes splitting in subwavelength grating metamaterial   ring resonators. APL Photonics 1 January 2023; 8 (1): 016102.   https://doi.org/10.1063/5.0122472APL Photonics上海科技大学，邹毅课题组
9S.   Shao, Z. Luo and T. Wu, Electro-Acoustic Phase Modulator Based on AlScN   Thin Film, in IEEE Electron Device Letters, vol. 44, no. 5, pp.   817-820, May 2023, doi: 10.1109/LED.2023.3259440.IEEE ELECTRON DEVICE LETTERS 上海科技大学，吴涛课题组
107.5   GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate ResonatorIEEE ELECTRON DEVICE LETTERS上海科技大学，吴涛课题组
11Junmin   Zhou, Haowen Guo, Haitao Du, Yu Zhang, Haolan Qu, Wei Huang, Jianjun Zhou,   Zhiqiang Xiao, and Xinbo Zou*, RF p-GaN HEMT with 0.9-dB Noise Figure   and 12.8-dB Associated Gain for LNA Applications, IEEE Electron Device   Letters, vol. 44, no. 9, pp. 1412-1415, Sept. 2023, doi:   10.1109/LED.2023.3294696.IEEE ELECTRON DEVICE LETTERS上海科技大学，邹新波课题组
12Z.   Luo et al., Aluminum Nitride Thin Film Based Reconfigurable Integrated   Photonic Devices, in IEEE Journal of Selected Topics in Quantum   Electronics, vol. 29, no. 3: Photon. Elec. Co-Inte. and Adv. Trans. Print.,   pp. 1-19, May-June 2023, Art no. 9300119, doi: 10.1109/JSTQE.2023.3245290.IEEE Journal on Selected Topics in Quantum Electronics上海科技大学，邹毅课题组
13K.   Yadagiri, , Y. Wang & T. Wu, “Magnetic field driven magnetic domains and   ferromagnetic resonances in multilayer thin films Ta/FeGaB/Ta for microwave   application,” J Mater Sci 58, 11327–11338 (2023).   https://doi.org/10.1007/s10853-023-08713-yJournal of Materials Science上海科技大学，吴涛课题组
14T.   Long et al., High-Speed 46-GHz 850 nm Photodetector with Inductive   Peaking, in Journal of Lightwave Technology, doi:   10.1109/JLT.2023.3328899.Journal Of Lightwave Technology 上海科技大学，陈佰乐课题组
15Z.   Shen et al., High-Speed Mid-Wave Infrared Uni-Traveling Carrier   Photodetector with Inductive Peaked Dewar Packaging, in Journal of   Lightwave Technology, doi: 10.1109/JLT.2023.3322967.JOURNAL OF LIGHTWAVE TECHNOLOGY 上海科技大学，陈佰乐课题组
16Y.   Zhu, W. Wang, et al. The study and optimization of ICP deep etching at   a low-temperature for InP solid-immersion metalens fabrication.   Materials Science in Semiconductor Processing 166 (2023): 107700.Materials   Science in Semiconductor Processing中科院上海技物所，王文娟课题组
17Yiwei   Wang et al.; Microwave-induced thermoacoustic imaging with a multi-cell AlScN   piezoelectric micromachined ultrasonic transducer. Appl. Phys. Lett. 27 March   2023; 122 (13): 133702.Applied Physics Letters上海科技大学，吴涛课题组
18Wenyang   Wang, Jinshan Yao, Linze Li, Huachen Ge, Luyu Wang, Liqi Zhu, Qiushi Chen,   Hong Lu, Baile Chen; High-speed InAlAs digital alloy avalanche photodiode.   Appl. Phys. Lett. 6 November 2023; 123 (19): 191102.APPLIED PHYSICS LETTERS上海科技大学，陈佰乐课题组
19Xin-Yang   J, Wei-Wei L, Tian-Xin L, et al. Enhanced absorption of infrared light for   quantum wells in coupled pillar-cavity arrays[J]. Optics Express, 2023,   31(5): 7090-7102.Optics express上海科技大学，陆卫课题组
20Dual color infrared photodetector with superconducting   metamaterials，Bingxin   Chen, Hong Pan,Liping Zhu, Hongtao Xu,Hengliang Wang,Lijian Zhang, Xiaomi   Yan, Chiyuan Ma,Xuguang Xu, Wei Lu, Zhenghua An*, and Yanru Song*, Optics   Express 31, 7440（2023).Optics express复旦大学,安正华课题组
21Yueyang   Hu, et al. High-efficient subwavelength structure engineered grating   couplers for 2-µm waveband high-speed data transmission. Optics Express   31.23 (2023): 39079-39087.Optics express上海科技大学，邹毅课题组
22Qiyuan   Yi, Guanglian Cheng, Zhiwei Yan, Qiyuan Li, Fanglu Xu, Yongchao Zou, Ting Li,   Yuhan Sun, Yi Zou, Yu Yu, and Li Shen, Silicon MMI-based power splitter   for multi-band operation at the 1.55 and 2 µm wave bands, Opt. Lett.   48, 1335-1338 (2023)Optics Letters上海科技大学，邹毅课题组
23Yuheng   Liu, Lipeng Xia, Ting Li, Yuhan Sun, Peiji Zhou, Li Shen, and Yi Zou,   High-efficiency mid-infrared on-chip silicon grating couplers for   perfectly vertical coupling, Opt. Lett. 48, 239-242 (2023)Optics Letters上海科技大学，邹毅课题组
24Y.   Qian et al., Analysis of Abnormal GIDL Current Degradation Under Hot   Carrier Stress in DSOI-MOSFETs, in IEEE Transactions on Electron   Devices, 2022, doi: 10.1109/TED.2022.3204513.IEEE Transactions on Electron Devices 上海科技大学，吴涛课题组
25P.   Luo, Y. Zou, X. Yang, J. Li, X. Huang, J. Zhou, X. Han, Y.S. Liu, Y.H. Liu,   and T. Wu. Improvement of YX42° Cut LiTaO3 SAW Filters with Optical   Proximity Effect Correction Method, Micromachines 14, no. 1: 205. Dec.   2022, doi:10.3390/mi14010205.Micromachines上海科技大学，吴涛课题组
26S.   Wu, K. Liu, W. Wang, W. Li, T. Wu, H. Yang, X, Li, Aluminum Nitride   Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive   Monitoring of Radial Artery Stiffness Micromachines, 14, no. 3: 539.   Feb. 2023. https://doi.org/10.3390/mi14030539Micromachines 上海科技大学，吴涛课题组
27Spurious-Free   Shear Horizontal Wave Resonators Based On 36Y-Cut LiNbO3 Thin FilmMicromachines 上海科技大学，吴涛课题组
28Yu   Zhang, Yitian Gu, Yitai Zhu, Baile Chen, Huaxing Jiang*, Kei May Lau*, and   Xinbo Zou*, Small Vth Shift and Low Dynamic Ron in GaN MOSHEMT With   ZrO2 Gate Dielectric, in IEEE Transactions on Electron Devices, vol.   70, no. 11, pp. 5590-5595, Nov. 2023, doi: 10.1109/TED.2023.3313999.IEEE Transactions on Electron Devices上海科技大学，邹新波课题组
29Yitian   Gu#, Wei Huang#*, Yu Zhang, Jin Sui, Yangqian Wang, Haowen Guo, Jianjun Zhou,   Baile Chen, and Xinbo Zou*, Temperature-Dependent Dynamic Performance   of p-GaN Gate HEMT on Si, IEEE Transactions on Electron Devices, vol.   69, no. 6, pp. 3302-3309, June 2022, doi: 10.1109/TED.2022.3167342.IEEE Transactions on Electron Devices上海科技大学，邹新波课题组
30Cai   J, Wang Y, Jiang D, et al. Photoacoustic Imaging Based on Broadened Bandwidth   Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers[J]. IEEE   Sensors Letters, 2023, 7(4): 1-4.IEEE Sensors Letters上海科技大学，吴涛课题组
31Jinyong   Shen, Jing Zhou*, Tianyun Zhu, Jie Deng, Bo Wang, Wenji Jing, Jiajun Ma,   Xinyue Qin, Huipeng Liu, Jiajun Li, Xiaoshuang Chen, Wei Lu, On-chip   long-wavelength infrared polarimeter for full-Stokes polarization detection.   Opt. Mater. Express 13, 2475 (2023).Optical Materials Express中科院上海技物所，周靖课题组
32Fangzhe   Li, Zeshi Chu, Jing Zhou*, Jie Deng, Jinyong Shen, Tianyun Zhu, Wenji Jing,   Xu Dai, Jiexian Ye, Xiaoshuang Chen*, Compact on-chip THz circular   polarization detectors with high discrimination based on chiral plasmonic   antennas, Opt. Mater. Express 13, 3330 (2023).Optical Materials Express中科院上海技物所，周靖课题组
33D.   Guo et al., High Operating Temperature Mid-Infrared InGaAs/GaAs   Submonolayer Quantum Dot Quantum Cascade Detectors on Silicon, in IEEE   Journal of Quantum Electronics, vol. 59, no. 2, pp. 1-6, April 2023, Art no.   2300106, doi: 10.1109/JQE.2023.3238754.IEEE JOURNAL OF QUANTUM ELECTRONICS 上海科技大学，陈佰乐课题组
34Lu   Yao, Wenyang Wang, Jinshan Yao, Kechao Lu, Hong Lu, Changcheng Zheng, Baile   Chen, Interband transitions of InAs/AlAs Short-Period superlattices grown by   molecular beam epitaxy, Journal of Crystal Growth, Volume 605, 2023, 127071,   ISSN 0022-0248, https://doi.org/10.1016/j.jcrysgro.2022.127071.journal of crystal growth 上海科技大学，陈佰乐课题组
35S.   Wu et al., Non-Invasive Carotid Artery Monitoring by Using Aluminum   Nitride PMUT Close-Packed Arrays, 2023 IEEE 36th International   Conference on Micro Electro Mechanical Systems (MEMS2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)上海科技大学，吴涛课题组
36Y.   Lu, K. Liu, Y. Wang, R. Nie and T. Wu, LNOI Thin-Film Dual-Axis   Resonant Micro-Mirror with E16 Torsional Actuation, 2023 IEEE 36th   International Conference on Micro Electro Mechanical Systems (MEMS), Munich,   Germany, 2023, pp. 669-672, doi: 10.1109/MEMS49605.2023.10052626.2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)上海科技大学，吴涛课题组
372.   Z. Luo, S Shao, T Wu. “High Quality Factor AlScN Lamb Wave Resonators Using   NbN/Al Top Electrodes at Cryogenic Temperature.” 2023 22nd International   Conference on Solid-State Sensors, Actuators and Microsystems (Transducers   2023) accepted.2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)上海科技大学，吴涛课题组
381.3.   Z. Luo, S Shao, T Wu. “Aluminum Scandium Nitride Lamb Wave Acoustic Delay   Lines with Over 6% Fractional Bandwidth.” 2023 22nd International Conference   on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)   accepted. 2.2. Z. Luo, S Shao, T Wu. “High Quality Factor AlScN Lamb Wave   Resonators Using NbN/Al Top Electrodes at Cryogenic Temperature.” 2023 22nd   International Conference on Solid-State Sensors, Actuators and Microsystems   (Transducers 2023) accepted.2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)上海科技大学，吴涛课题组
39Y.   Wang et al., Microwave-Induced Thermoacoustic Imaging Using Aluminum   Nitride PMUT, 2023 IEEE 36th International Conference on Micro Electro   Mechanical Systems (MEMS), Munich, Germany, 2023, pp. 413-416, doi:   10.1109/MEMS49605.2023.10052158.2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)上海科技大学，吴涛课题组
40L.   Li, L. Wang and B. Chen, High-speed Waveguide Modified Uni-Traveling   Carrier Photodiodes with 130 GHz Bandwidth, 2023 Opto-Electronics and   Communications Conference (OECC), Shanghai, China, 2023, pp. 1-3, doi:   10.1109/OECC56963.2023.10209607.2023 Opto-Electronics and Communications Conference (OECC)上海科技大学，陈佰乐课题组
41Z.   Shen, J. Yao, H. Lu and B. Chen, Mid-Wave Infrared High-Speed InAs/GaSb   Superlattice Uni-Traveling Carrier Photodetector, 2023 Opto-Electronics   and Communications Conference (OECC), Shanghai, China, 2023, pp. 1-3, doi:   10.1109/OECC56963.2023.10209925.2023  Opto-Electronics and Communications Conference (OECC)上海科技大学，陈佰乐课题组
42L.   Xia, Y. Sun, T. Li, P. Zhou, and Y. Zou, Photonic Crystal Microcavity   Based Integrated Spectrometer at the 2 μm Wavelength Band, in CLEO   2023, Technical Digest Series (Optica Publishing Group, 2023), paper ATh4I.3.CLEO 2023上海科技大学，邹毅课题组