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工艺技术

序号2025年度*致谢SMDL的论文名称发表期刊/会议课题组发表日期
1All-Zero Tunneling Rates in an Ultra-Dense Waveguide ArrayLASER & PHOTONICS REVIEWS邹毅课题组，上海科技大学2025年5月
2Acousto-Optic Modulation on Silicon-Aluminum Nitride Hybrid-Integrated Platform for Cryogenic ApplicationsNANO LETTERS邹毅课题组，上海科技大学2025年3月
3Lithium niobate modulator from room temperature to cryogenic conditionsOptics Letters邹毅课题组，上海科技大学2025年2月
4Acousto-optic modulation on aluminum scandium nitride - silicon hybrid integrated platformIEEE Silicon Photonics Conference邹毅课题组，上海科技大学2025年5月
5Coupling manipulation enabled high-performance devicesOPTICAL INTERCONNECTS AND PACKAGING 2025邹毅课题组，上海科技大学2025年3月
6Low-threshold dual-polarization electro-optic nonlinear activation functionsAPL PHOTONICS邹毅课题组，上海科技大学2025年1月
7Reconfigurable terahertz optoelectronic logic through charge-density-wave phase engineeringNATURE COMMUNICATIONS王林课题组，中国科学院上海技术物理研究所2025年5月
8High-performance Teraherz photodetection in 2D materials and topological materialsJOURNAL OF PHYSICS D-APPLIED PHYSICS王林课题组，中国科学院上海技术物理研究所2024年12月
9Antiferromagnetic semimetal terahertz photodetectors enhanced through weak localizationNATURE COMMUNICATIONS王林课题组，中国科学院上海技术物理研究所2025年1月
10Sub-Skin-Depth Nanoslit Integrated Topological Insulator Devices for Self-Driven Broadband Terahertz Detection and ImagingLASER & PHOTONICS REVIEWS王林课题组，中国科学院上海技术物理研究所2025年3月
11A chip-integrated comb-based microwave oscillatorLIGHT-SCIENCE & APPLICATIONS陈佰乐课题组，上海科技大学2025年4月
12Tunable Near-Infrared Photodetection Enabled by Plasmonic Effect in Er-Doped GaAsADVANCED OPTICAL MATERIALS陈佰乐课题组，上海科技大学2025年6月
13High-speed long-wave infrared quantum-dot quantum cascade detectorINFRARED PHYSICS & TECHNOLOGY陈佰乐课题组，上海科技大学2025年5月
14Low noise low dark current AlAsSb/GaAsSb digital alloy avalanche photodiodeOptics Express陈佰乐课题组，上海科技大学2025年2月
15High-Speed InGaP/AlGaAs Avalanche Photodiodes for LED-Based Visible Light CommunicationIEEE Transactions on Electron Devices陈佰乐课题组，上海科技大学2025年4月
16High-Speed InAlAs Digital Alloy Avalanche Photodiode with Partially Depleted Absorber2024 Asia Communications and Photonics Conference (ACP)陈佰乐课题组，上海科技大学2024年12月
17Ultrafast Waveguide MUTC Photodiode with a 3dB Bandwidth of 240 GHz2024 Asia Communications and Photonics Conference (ACP)陈佰乐课题组，上海科技大学2024年12月
18Wafer-Scale Nanoprinting of 3D Interconnects beyond CuACS NANO冯继成课题组，上海科技大学2025年4月
193D-Printed High-Entropy Alloy NanoarchitecturesSMALL冯继成课题组，上海科技大学2025年1月
20Faraday LithographyNANO LETTERS冯继成课题组，上海科技大学2025年4月
21AlScN Ferroelectric Diode Enabled CAM with 4F2 Cell Size and Low Thermal Budget (330 °C)IEEE Electron Device Letters吴涛课题组，上海科技大学2025年2月
22Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin filmAPPLIED PHYSICS LETTERS吴涛课题组，上海科技大学2025年3月
23Tunable acoustic delay lines based on thermally controlled single-phase unidirectional transducersAPPLIED PHYSICS LETTERS吴涛课题组，上海科技大学2025年4月
24Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO₃/SiO₂/Si SubstratesIEEE Transactions on Electron Devices吴涛课题组，上海科技大学2025年3月
25Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional TransducersJournal of Microelectromechanical Systems吴涛课题组，上海科技大学2025年2月
263.5 GHZ THERMO-ACOUSTIC PHASE MODULATOR BASED ON Z-CUT LINBO3 THIN FILM2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS吴涛课题组，上海科技大学2025年3月
27ALSCN LAMB WAVE RESONATOR BASED ON NBN SUPERCONDUCTING ELECTRODE AT CRYOGENIC TEMPERATURE2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS吴涛课题组，上海科技大学2025年3月
28NONINVASIVE ARTERIAL MOTION MONITORING WITH ALUMINUM NITRIDE-BASED PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS吴涛课题组，上海科技大学2025年3月
29Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant SensorIEEE TRANSACTIONS ON MAGNETICS吴涛课题组，上海科技大学2024年7月
30Soft Magnetism and Microwave Properties of FeCoSiB Ferromagnetic Alloys Grown on AlN and AlScN Thin FilmsIEEE Magnetics Letters吴涛课题组，上海科技大学2025年1月
31Tunable chiral magneto-transport through band structure engineering in magnetic topological insulators Mn(Bi1-xSbx)2Te4SCIENCE ADVANCES寇煦丰课题组，上海科技大学2025年5月
32Controllable magnetism and an anomalous Hall effect in (Bi1-xSbx)2Te3-intercalated MnBi2Te4 multilayersNANOSCALE寇煦丰课题组，上海科技大学2025年2月
33Tunable interfacial Rashba spin-orbit coupling in asymmetric AlxIn1-xSb/InSb/CdTe quantum well heterostructuresAPPLIED PHYSICS LETTERS寇煦丰课题组，上海科技大学2025年1月
34Achieving Ultra-High Background-Limited Detectivity by a Brillouin Zone Folding Induced Quasi-Bound State in the ContinuumADVANCED OPTICAL MATERIALS周靖课题组，中国科学院上海技术物理研究所2024年9月
35Integrated Circular Polarization Detectors Based on Asymmetric Materials or StructuresSYMMETRY-BASEL周靖课题组，中国科学院上海技术物理研究所2025年3月
36Advances in integrated polarization detectors with innovative featuresJournal of Infrared and Millimeter Waves周靖课题组，中国科学院上海技术物理研究所2025年6月
37Ultrasensitive and Fast Gas Detection Based on Room-Temperature Indium Arsenide Mid-Wavelength Infrared PhotodetectorsADVANCED FUNCTIONAL MATERIALS胡伟达课题组，中国科学院上海技术物理研究所2025年1月
38On-Chip Brillouin Amplifier in Suspended Lithium Niobate NanowaveguidesLASER & PHOTONICS REVIEWS陆娟娟课题组，上海科技大学2025年4月
39Oxygen vacancy modulation of nanolayer TiOx to improve hole-selective passivating contacts for crystalline silicon solar cellsJOURNAL OF MATERIALS CHEMISTRY A李东栋课题组，张江实验室2024年10月
40Area-Selective Molecular Layer Deposition of Alucone on Photoresist for Enhanced Pattern TransferCHEMISTRY OF MATERIALS熊诗圣课题组，张江实验室2024年11月
41Detecting Hot Electron-Induced Local Damage Using THz Near-Field Optical MicroscopyACS PHOTONICS陆卫课题组，上海科技大学2025年3月
42Enhanced photothermoelectric conversion in self-rolled tellurium photodetector with geometry-induced energy localizationLIGHT-SCIENCE & APPLICATIONS黄高山课题组，复旦大学2024年7月
431.48-dB-Noise Figure E-Mode Recessed-Gate GaN MOSHEMT by Argon-Based Neutral Beam Etching for LNA ApplicationsIEEE Transactions on Electron Devices邹新波课题组，上海科技大学2025年2月
44Enhanced linearity of AlGaN/GaN HEMTs via dual-gate configuration for RF amplifier applicationsSOLID-STATE ELECTRONICS邹新波课题组，上海科技大学2025年4月
45Dynamic characteristics of neutral beam etching enabled normally-off recessed-gate GaN MOSHEMTPower Electronic Devices and Components邹新波课题组，上海科技大学2025年3月
46Third harmonic resistance in ferromagnet/heavy-metal bilayersPHYSICAL REVIEW B杨雨梦课题组，上海科技大学2025年3月
47The impact of P-type doping level and profile on performance of InAs quantum dot lasersJOURNAL OF APPLIED PHYSICS龚谦课题组，上海科技大学2024年12月
48Modified uni-travelling-carrier photodiodes with 206 GHz bandwidth and 0.81 A W-1 external responsivityNATURE PHOTONICS陈佰乐课题组，上海科技大学2025年11月
49A chip-based optoelectronic-oscillator frequency combELIGHT陈佰乐课题组，上海科技大学2025年7月
5014 Gb/s MWIR FSO Transmission using Directly Modulated QCL and an Uncooled UTC-PD at Room-Temperature2025 European Conference on Optical Communications (ECOC)陈佰乐课题组，上海科技大学2025年12月
51230 GHz MUTC Photodiodes Integrated on Thin-film Lithium Niobate2025 Optical Fiber Communications Conference and Exhibition (OFC)陈佰乐课题组，上海科技大学2025年7月
52Noise fluctuations in composition-graded mid-wavelength infrared photodiode from temperature and illuminationOptics Express陈佰乐课题组，上海科技大学2025年9月
53Ultrafast Waveguide MUTC Photodiode Targeting Over 200 GBaud Applications at 1310 nm and 1550 nm2025 Optical Fiber Communications Conference and Exhibition (OFC)陈佰乐课题组，上海科技大学2025年7月
54Hybrid Silicon-Interposer Platform With Integrated Suspended Antenna for Compact Photonic Terahertz CommunicationsJOURNAL OF LIGHTWAVE TECHNOLOGY陈佰乐课题组，上海科技大学2025年8月
55InAlAs digital alloy avalanche photodiode with partially depleted absorberOptics Letters陈佰乐课题组，上海科技大学2025年9月
56GaAs-Based Modified Uni-Traveling Carrier Photodetector for Simultaneous High-Speed Data Transmission and DC Electrical Power Generation2022 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE, ACP陈佰乐课题组，上海科技大学2023年4月
57InP-Based Extended-Short Wave Infrared Heterojunction PhototransistorJOURNAL OF LIGHTWAVE TECHNOLOGY陈佰乐课题组，上海科技大学2021年4月
58Spurious Mode Suppression in LiNbO3 A1 Resonators and Filters Beyond 6 GHz With Through-HolesJOURNAL OF MICROELECTROMECHANICAL SYSTEMS余思远、陈延峰课题组，南京大学2025年7月
59Gas-Phase Assembly of Semiconductor Nanostructures into Functional Field-Effect TransistorsSMALL冯继成课题组，上海科技大学2025年9月
60Vertically-Aligned Hybrid Plasmonic Nanoantennas with Tailored Visible-Light ResponsesNANO LETTERS冯继成课题组，上海科技大学2025年7月
61Electrical Detection in Two-Terminal Perpendicularly Magnetized Devices via Geometric Anomalous Nernst EffectADVANCED ELECTRONIC MATERIALS寇煦丰课题组，上海科技大学2025年11月
62Shubnikov-de Haas Quantum Oscillations with Large Spin Splitting in High-Mobility Al0.8Ga0.2Sb/InAs/Al0.8Ga0.2Sb Quantum-Well HeterostructuresCHINESE PHYSICS LETTERS寇煦丰课题组，上海科技大学2025年9月
63Bipolar Doping in van der Waals Semiconductors through Flexo-DopingACS NANO陆卫课题组，上海科技大学2025年11月
64Wave vector filter based on surface and Tamm plasmon polaritonsOPTICS LETTERS陆卫课题组，上海科技大学2025年6月
65Monolithic Integration of InP Metalens With InGaAs/InP Single Photon Avalanche DiodeIEEE PHOTONICS TECHNOLOGY LETTERS王文娟课题组，中国科学院上海技术物理研究所2025年10月
66Pronounced scale-dependent charge carrier density in graphene quantum Hall devicesMATERIALS TODAY PHYSICS王浩敏课题组，中国科学院上海微系统与信息技术研究所2025年11月
67Signatures of magnetism in zigzag graphene nanoribbons embedded in a hexagonal boron nitride latticeNATURE MATERIALS王浩敏课题组，中国科学院上海微系统与信息技术研究所2025年8月
68Efficient and tunable frequency conversion using periodically poled thin-film lithium tantalate nanowaveguidesNANOPHOTONICS陆娟娟课题组，上海科技大学2025年8月
69Octave Soliton Microcombs in Z-Cut Lithium Tantalate MicroringsACS PHOTONICS陆娟娟课题组，上海科技大学2025年7月
70Second harmonic generator with an on-chip wavelength division demultiplexerAPPLIED OPTICS陆娟娟课题组，上海科技大学2025年10月
71Large-scale quantum dot-lithium niobate hybrid integrated photonic circuits enabling on-chip quantum networkingNATURE MATERIALS张加祥课题组，中国科学院上海微系统与信息技术研究所2025年11月
72Ultrabroadband Photosensitivity and Frequency-Mixing in Anisotropic Weyl Semimetal NbNiTe2ACS NANO王林、陈效双课题组，中国科学院上海技术物理研究所2025年9月
73Room-Temperature broadband terahertz detection with Ultrahigh polarization ratio in Type-II Weyl semimetal WTe2INFRARED PHYSICS & TECHNOLOGY王林、陈效双课题组，中国科学院上海技术物理研究所2025年12月
74Selective Growth of Type-II Weyl-Semimetal and Van der Waals Stacking for Sensitive Terahertz PhotodetectionADVANCED FUNCTIONAL MATERIALS王林、陈效双课题组，中国科学院上海技术物理研究所2023年12月
75The Microscopic Mechanisms of Nonlinear Rectification on Si-MOSFETs Terahertz DetectorSENSORS王林、陈效双课题组，中国科学院上海技术物理研究所2023年6月
76Enhancement of terahertz response in a microstructure-integrated-type-II Dirac semimetalAIP ADVANCES王林、陈效双课题组，中国科学院上海技术物理研究所2023年11月
77High-frequency rectifiers based on type-II Dirac fermionsNATURE COMMUNICATIONS王林、陈效双课题组，中国科学院上海技术物理研究所2021年3月
78Piezoelectric-Metal Phononic Crystal Enabling GHz Tunable Ultrahigh Q Quasi-BIC ModeADVANCED SCIENCE吴涛课题组，上海科技大学2025年10月
79A Large Bandwidth Scandium Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Based on Sacrificial Layer Technology2025 IEEE International Ultrasonics Symposium (IUS)吴涛课题组，上海科技大学2025年10月
80An 8.8 GHz Aluminum Nitride S1 Lamb Mode Resonator2025 IEEE International Ultrasonics Symposium (IUS)吴涛课题组，上海科技大学2025年10月
81High-Order Piezoelectric Micromachined Ultrasonic Transducer with Enhanced Transmit Performance via Electrode Optimization2025 IEEE International Ultrasonics Symposium (IUS)吴涛课题组，上海科技大学2025年10月
82Loss investigations of high-frequency lithium niobate Lamb wave resonators at ultralow temperaturesAPPLIED PHYSICS LETTERS吴涛课题组，上海科技大学2025年10月
83Effects of NbN superconducting electrodes on the cryogenic characteristics of lamb wave mode AlScN piezoelectric MEMS resonatorsSENSORS AND ACTUATORS A-PHYSICAL吴涛课题组，上海科技大学2025年9月
84A High-Performance Piezoelectric Micromachined Ultrasonic Transducer Hexagonal Array Utilizing Sacrificial Layer Technology2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)吴涛课题组，上海科技大学2025年8月
85Gigahertz Bending Acoustic Waveguides in Aluminum Scandium Nitride Film2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)吴涛课题组，上海科技大学2025年8月
86Gigahertz Focusing Acoustic Delay Lines for Phononic Integrated Circuits2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)吴涛课题组，上海科技大学2025年8月
87Magnetic Field-Tunable Nonreciprocal Acoustic Transducer with Lorentz Force Interaction2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)吴涛课题组，上海科技大学2025年8月
88NBN Superconducting Electrodes for Cryogenic Lamb Wave Resonators on Lithium Niobate with Enhanced Quality Factor2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)吴涛课题组，上海科技大学2025年8月
89Wide-Band Acoustic Delay Lines Based on Dual Single-Phase Unidirectional Transducers2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)吴涛课题组，上海科技大学2025年8月
90Tuning TCF and Spurious-Free Response in SH-SAW Resonators via Energy DistributionIEEE Transactions on Electron Devices吴涛课题组，上海科技大学2025年10月
91A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic RangeJournal of Microelectromechanical Systems吴涛课题组，上海科技大学2025年9月
92High Figure-of-Merit 36Y-Cut LiNbO3 Lamb Wave Resonators With Dissipation Loss OptimizationIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control吴涛课题组，上海科技大学2025年6月
93Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon WaferMICROMACHINES吴涛课题组，上海科技大学2024年3月
94ULTRA-WIDEBAND MEMS FILTERS USING LOCALIZED THINNED 128° Y-CUT THIN-FILM LITHIUM NIOBATE2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS吴涛课题组，上海科技大学2023年3月
95AN ALUMINUM-NITRIDE PMUT WITH PRE-CONCAVED MEMBRANE FOR LARGE DEFORMATION AND HIGH QUALITY-FACTOR PERFORMANCE2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)吴涛课题组，上海科技大学2021年8月
96OPTIMIZATION OF ALN AND ALSCN FILM ICP ETCHING2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)吴涛课题组，上海科技大学2021年3月
97Nonlinear infrared photocurrent driven by Lifshitz transitionINFRARED PHYSICS & TECHNOLOGY胡伟达课题组，中国科学院上海技术物理研究所2025年11月
98Quality Factor Degradation Due to the In-plane Misorientation in POI-SAW Resonators2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS)欧欣课题组，中国科学院上海微系统与信息技术研究所2022年12月
99Multilayer A17 Black Antimonene via van der Waals EpitaxyACS NANO王宏达课题组，上海科技大学2025年10月
100Hydrogen effect on diffuson-dominant thermal conductivity in a-SiNxPHYSICAL REVIEW B王宏达课题组，上海科技大学2024年9月
101Nanopatterns beyond the Feature Size Limit via Bilayer Electron Beam Lithography for Nanoelectronics ApplicationsACS APPLIED NANO MATERIALS熊诗圣课题组，张江实验室2025年7月
102High-Frequency Bulk Acoustic Wave Resonator with Ferromagnetic Electrodes for Magnetic Field Sensing2025 IEEE International Ultrasonics Symposium (IUS)杨雨梦课题组，上海科技大学2025年10月
103Printed Soft Electronic Skin Based on a Dual-Atom Nanozyme for Multiplexed Epidermal SensingACS SENSORS于游课题组，上海科技大学2025年10月
104Core-Sheath Braided Yarn-Based Wearable Bioelectronics for Sweat Capture and Multimodal SensingANALYTICAL CHEMISTRY于游课题组，上海科技大学2025年10月
105Printed sensing human-machine interface with individualized adaptive machine learningSCIENCE ADVANCES于游课题组，上海科技大学2025年9月
106Tuning the Decay Length of Long-Range Photocurrent in Weyl Semimetals by Engineering the Weighting FieldNANO LETTERS周靖课题组，中国科学院上海技术物理研究所2025年11月
107High discrimination infrared polarimetry via intrinsic anisotropic photogating in black phosphorus meta-polarization detectorsNATURE COMMUNICATIONS周靖课题组，中国科学院上海技术物理研究所2025年11月
108Monolithic High-Accuracy Long-Wave Infrared Full-Stokes Polarimeter Based on a Meta-QWIPLASER & PHOTONICS REVIEWS周靖课题组，中国科学院上海技术物理研究所2025年9月
109Circular Polarimetric Imaging with a Metamaterial Integrated Long-Wavelength Infrared Focal Plane ArrayADVANCED SCIENCE周靖课题组，中国科学院上海技术物理研究所2025年7月
110Cavity coupled plasmonic resonator enhanced infrared detectorsAPPLIED PHYSICS LETTERS周靖课题组，中国科学院上海技术物理研究所2021年10月
111Low-loss GaN monolithic bidirectional switch via antiparallel connected HEMTs with recessed Schottky drainAPPLIED PHYSICS LETTERS邹新波课题组，上海科技大学2025年10月
112Accelerated exceptional point encirclement in anti-parity-time symmetric systems for ultra-compact chiral mode switchingAPPLIED PHYSICS REVIEWS邹毅课题组，上海科技大学2025年11月
113Ultra-Broadband Continuous-Wave Mid-Infrared Wavelength Conversion in Germanium-on-Silicon WaveguidesLASER & PHOTONICS REVIEWS邹毅课题组，上海科技大学2025年9月

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